Videos of  High Performance Steerable Micro Mirrors

(Caution, these are Large Video Files)

Still Images of MEMS Steerable Mirrors

(Click on Thumbnail for Larger Images)

 

High Performance MEMS Scanning Mirror	Section of High Performance  Post Actuator	Close Up of MEMS Post Style Actuator
Large Force Electrostatic MEMS Comb Drive	Two Degree of Freedom MEMS Mirror	Detail View of MEMS Mirror Edge prior to Final Polish of Mirror Surface
Detail View Cross-Coupled Actuator	Unique MEMSHinge Structure	MEMS Mirror Lift Assembly
MEMXS Mirror Control Assembly	Detail View of MEMS Electrostatic Actuator	Ultra Stiff MEMS Mirror Device

These pictures serve the complexity that can be achieved in a state of the art Surface Micromachine technology. 

The Links Below Show Some MEMS Devices from Sandia National Laboratories