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This is a 2.4 M file, and the video might take several minutes to load This mirror represents the state-of-the-art in MEMS based micromirrors. The mirror is 1.3 mm long, and the edge of the mirror can be elevated 2 mm above the surface of the silicon substrate. Each mirror contains electrostatic actuators with over 100,000 mechanical fingers. Each of these five level actuators can produce an electrostatic force of over 5 millinewtons. The device is based completely on compliant elements, so there are no rubbing or touching surfaces. This enables extremely precise positioning, and devices without mechanical wear. These devices are suitable for use in tunable lasers. The large range of motion enables unprecedented levels of tuning. The devices are also suitable for use in general optical scanning applications. |
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